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Cleveland State University Course Info
Cleveland, Ohio
Course Info
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EEC 646
Dynamics and Control of MEMS
This course provides a comprehensive overview of MEMS technique and MEMS control. Topics include MEMS fabrication processes, MEMS sensors and actuators, Dynamic modeling of MEMS devices, control, signal processing, and electronics for MEMS, and case studies of MEMS.
Units: 4.0
Prerequisites:
EEC 510 - Linear Systems