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- ece-6229 - introduction-to-mems
Georgia Institute of Technology-Main Campus Course Info
Atlanta, Georgia•
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Course Info
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ECE 6229
Introduction to MEMS
Introduction to Micro-Electro-Mechanical systems: Microfabrication techniques including: photolithography, etching, physical and chemical vapor deposition, electroplating, bonding and polymer processing. Application to sensors and actuators. Credit not allowed for both ECE 6229 and ME 6229 or CHBE 6229.
Units: 3.0