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Georgia Institute of Technology-Main Campus Course Info

Atlanta, Georgia

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Course Info

Search for courses by clicking on letters of the alphabet or by using a search bar. Explore course description, number of credits required and course sequences to satisfy graduation requirements.


ECE 6759

Plasma Processing

Fundamental physics, chemistry, chemical engineering, and electrical engineering principles inherent in plasma processes. Includes etching, deposition, diagnostic methods, and control schemes. Crosslisted with CHE 6759.

Units: 3.0