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- egt-280 - introduction-to-microtechnology
Northern Kentucky University Course Info
Highland Heights, Kentucky
Course Info
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EGT 280
Introduction to Microtechnology
Introduction to microtechnology including materials properties (physical, thermal, electrical, and mechanical), fundamentals of microfabrication including various deposition methods, photolithography, etching, LIGA electroplating, and self-assembly characterization of small structures and applications of microdevices such as MEMS sensors and actuators, accelerometers, optical switches and microfluidics
Units: 3.0
Hours: 3 classroom + 0 lab/studio
Prerequisites:
PHY 220 - University Physics with Laboratory I - SL
or
PHY 211 - General Physics with Laboratory I - SL