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×Davis, California•
Mechanical design of micro-electronmechanical systems(MEMS). Device modeling: lumped parameter models; energy methods; nonlinearities; electrical and mechanical noise sources. Actuation and measurement methods: capacitive, piezoresistive, thermal, piezoelectric, and optical techniques. Review of basic electronics: bridge circuits, amplitude modulation; lock-in detection.
Units: 4.0
Hours: Lecture—4 hour(s).