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- ece-543 - fundamentals-of-microfabrication-and-mems
University of Louisville Course Info
Louisville, Kentucky
Course Info
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ECE 543
Fundamentals of Microfabrication and MEMS
Microfabrication techniques including cleanroom technology, lithography, thermal oxidation, diffusion, ion implantation, film deposition, etching, micromachining, wafer-level bonding/polishing, and packaging yield. Microtechnology measurement and analysis techniques. Process simulation. CAD device-layout. MEMS (microelectromechanical systems) and microelectric technology and applications. Material issues for MEMS/microelectronics
Units: 3.0