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- eee-4274 - mems-i-chemical-biomedical-sensors-and-microfabrication
University of South Florida-Main Campus Course Info
Tampa, Florida•
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Course Info
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EEE 4274
MEMS I: Chemical/Biomedical Sensors and Microfabrication
The course gives an introduction to MEMS, microfabrication techniques and processes as well as basic design principles of biological and chemical Sensors. The course concentrates on basics of MEMS, different processes involved and principles of sensing.
Units: 3.0